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Halar®
(ECTFE) encapsulated stainless steel pressure vessel for easy delivery of
ultra-pure wafer processing chemicals. These vessels are A.S.M.E. code
certified for up to 100 psi.
Simply place a 1 gallon (4 liters) or smaller chemical bottle inside the
vessel, secure the lid and pressurize with CDA or an inert gas.
The chemical is piped out through a dual contained, 1/4" O.D. Teflon®
tube. |