Cpk Industries, LLC        Precision Products for Microelectronics

 

General Product Features

POLOS Single Substrate Spin Processor

 

 

Home

Wafer Processing

Local Reps

News

Links

Downloads

Click on the link above for an Independent Spin Performance Test.

        Click for larger image                 Click for larger image                      

   POLOS 300 MCD / ACD    POLOS 200 MCD / ACD   POLOS Spin 150

Manual or Automatic Chemical Dispense configurations

 

  • Table-top or Recessed In-Bench Models

  • Available in Natural Polypropylene or  TFM Grade Teflon®

  • Digital Process Controller - easy step-by-step programmable Speed, Acceleration and Time with up to 50 programs with up to 99 steps each program

  • Skip forward / Skip backwards Step Function

  • Digitally controlled DC Servo with encoder feedback, 0-6,000 or 0-10,000 rpm speed range

  • Easy to read Graphics Display

  • Sealed Keypad with numeric inputs.

  • Features Clear Flat Lid with 3/4" center hole or Clear Dome Lid with up to 7 injectors.

  • Drain / Exhaust Port (standard), Rinse-to-Resistivity (optional)

  • Quickly changeable spin chucks, standard and custom designs available

  • Safety Door Interlock: Rotation stops when opening door

  • All models CE marked   

  • Includes 1 year limited warranty on parts and labor.  Full Warranty Information

Custom Configurations are Available

Home  |  Wafer Processing  |  Final Assembly  |  News  |  Links  |  Contact Us 

Copyright © 2003 Cpk Industries, LLC. All rights reserved.
Revised: 05/12/07