Mini Wet Station

Cpk Industries, LLC Precision Products for Microelectronics

Cpk Industries, LLC can provide cost effective, turn-key solutions for many single wafer processes including:

SC1 / SC2 Clean

Piranha Clean

Organic Clean

Wet Etch

Metal Lift-off

Spray Develop

Resist Coat

...and more

Wet Stations are available in 21", 42" and 50" widths in CP7-D (FM 4910 Approved) Polypropylene. Chemical tanks, heaters/chillers, etc. are safely stored in a slide out drawer.

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Available options include:

Chemical Heaters / Chillers

A.S.M.E. Vessels for pressurized chemical delivery

Teflon® Pumps

Rinse to Resistivity Module

D.I. / N2 Spray Guns

Integrated Vacuum Wands

High Pressure (up to 2000psi) D.I. Pump

CO₂ Fire Suppression System

Interlocked Secondary Enclosures

Work Light

At the heart of each Mini Wet Station is the POLOS ACD Spin Processor. Available in 200mm and 300mm sizes of either Polypropylene or TFM grade of Teflon®, these rugged, reliable units deliver repeatable performance. Mini Wet Stations save time, trouble, clean room floor space and are surprisingly affordable.

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